Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11226564 | EUV light source and apparatus for lithography | Jhan-Hong YEH, Cheng-Chieh Chen, Li-Jui Chen, Henry Yee Shian Tong, Wen-Chih Wang +1 more | 2022-01-18 |
| 11158989 | Laser source device, extreme ultraviolet lithography device and method | Henry Yee Shian Tong, Wen-Chih Wang, Hsin-Liang Chen, Louis Chun-Lin Chang, Cheng-Chieh Chen +2 more | 2021-10-26 |
| 10624196 | Laser source device and extreme ultraviolet lithography device | Henry Yee Shian Tong, Wen-Chih Wang, Hsin-Liang Chen, Louis Chun-Lin Chang, Cheng-Chieh Chen +2 more | 2020-04-14 |
| 9970105 | Method for sealing processing module | Chun-Ta Chen, Cheng-Chieh Chen, Hong-Hsing Chou, Yeh-Chieh Wang, Shyue-Shin Tsai +1 more | 2018-05-15 |
| 8149562 | System for decharging a wafer or substrate after dechucking from an electrostatic chuck | Yen-Hsiang Hsu | 2012-04-03 |
| 7354555 | Gas flow control system with interlock | Chih-Pen Yen, Jeng-Chiang Chuang, Cheng-Fang Lin, Yung-Mao Hsu | 2008-04-08 |
| 6708565 | Ultrasonic wafer blade vibration detecting | Chein-Fang Lin, Chih-Pen Yen, Yong Hsu | 2004-03-23 |