Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7354555 | Gas flow control system with interlock | Jeng-Yann Tsay, Jeng-Chiang Chuang, Cheng-Fang Lin, Yung-Mao Hsu | 2008-04-08 |
| 6815653 | Method and apparatus for early detection of material accretion and peeling in plasma system | Jenq-Yann Tsay, Jeng-Chiang Chuang, Yung-Mao Hsu | 2004-11-09 |
| 6708565 | Ultrasonic wafer blade vibration detecting | Chein-Fang Lin, Jeng-Yann Tsay, Yong Hsu | 2004-03-23 |