Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7354555 | Gas flow control system with interlock | Chih-Pen Yen, Jeng-Yann Tsay, Jeng-Chiang Chuang, Cheng-Fang Lin | 2008-04-08 |
| 6815653 | Method and apparatus for early detection of material accretion and peeling in plasma system | Jenq-Yann Tsay, Jeng-Chiang Chuang, Chih-Pen Yen | 2004-11-09 |
| 5851343 | Protective shield around the inner edge of endpoint window in a plasma etching chamber | CHING-CHUNG WU | 1998-12-22 |
| 5697839 | Ventilation hood for wet-clean process chamber | Ying Chen, Wei-Yao Chien, Deh-Hsiung Peng | 1997-12-16 |