Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7381293 | Convex insert ring for etch chamber | Ming-Yi Wang, Jeng-Yen Tsai, Chon-Yai Tasi | 2008-06-03 |
| 7354555 | Gas flow control system with interlock | Chih-Pen Yen, Jeng-Yann Tsay, Cheng-Fang Lin, Yung-Mao Hsu | 2008-04-08 |
| 6815653 | Method and apparatus for early detection of material accretion and peeling in plasma system | Jenq-Yann Tsay, Chih-Pen Yen, Yung-Mao Hsu | 2004-11-09 |
| 6733621 | Venting apparatus and method for vacuum system | — | 2004-05-11 |