Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12360464 | Lithography system and method thereof | Shao-Hua Wang, Chueh-Chi Kuo, Kuei-Lin Ho, Cheng-Wei Sun, Wei Chen +3 more | 2025-07-15 |
| 12164235 | Semiconductor processing tool and methods of operation | Shao-Hua Wang, Kueilin HO, Cheng-Wei Sun, Chih-Chun CHIANG, Yi-Fam Shiu +3 more | 2024-12-10 |
| 11803129 | Semiconductor processing tool and methods of operation | Shao-Hua Wang, Kueilin HO, Cheng-Wei Sun, Chih-Chun CHIANG, Yi-Fam Shiu +3 more | 2023-10-31 |
| 11782350 | Lithography system and method thereof | Shao-Hua Wang, Chueh-Chi Kuo, Kuei-Lin Ho, Cheng-Wei Sun, Wei Chen +3 more | 2023-10-10 |
| 11520243 | Lithography system and method thereof | Shao-Hua Wang, Chueh-Chi Kuo, Kuei-Lin Ho, Cheng-Wei Sun, Wei Chen +3 more | 2022-12-06 |