Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12226807 | Cleaning device for cleaning electroplating substrate holder | Chung-En Kao, Victor Lu | 2025-02-18 |
| 12014912 | Apparatus and method for physical vapor deposition | Wen-Cheng Yang, Chyi-Tsong Ni | 2024-06-18 |
| 11713509 | Flow guide apparatus and vapor deposition device | Qiang Zhang, Beumku Park, Yuanjiang YANG, Tianming Li, Qingke He +5 more | 2023-08-01 |
| 11433440 | Cleaning device for cleaning electroplating substrate holder | Chung-En Kao, Victor Lu | 2022-09-06 |
| 10504776 | Methods for forming through-substrate vias penetrating inter-layer dielectric | Ming-Fa Chen, Sen-Bor Jan | 2019-12-10 |
| 10307798 | Cleaning device for cleaning electroplating substrate holder | Chung-En Kao, Victor Lu | 2019-06-04 |
| 10049965 | Through-substrate vias and methods for forming the same | Ming-Fa Chen, Sen-Bor Jan | 2018-08-14 |
| 9355935 | Connecting through vias to devices | Ming-Fa Chen, Sen-Bor Jan | 2016-05-31 |
| 9123702 | Connecting through vias to devices | Ming-Fa Chen, Sen-Bor Jan | 2015-09-01 |
| 8803292 | Through-substrate vias and methods for forming the same | Ming-Fa Chen, Sen-Bor Jan | 2014-08-12 |
| 8624324 | Connecting through vias to devices | Ming-Fa Chen, Sen-Bor Jan | 2014-01-07 |