Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6652716 | Apparatus and method for self-aligning a cover ring in a sputter chamber | Min-Te Lai | 2003-11-25 |
| 6358851 | Sputter PM procedures with polish tool to effectively remove metal defects from target surface nodules (residue) | Ming-Tsong Wang, Kuang-Hsing Liu, Ta-Bin Chen | 2002-03-19 |