Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10173407 | Device for removing and adhering substrate and method for using the device | Chen-Chu Tsai, Cheng-Yi Wang, Shi-Chang Chen | 2019-01-08 |
| 9607809 | High density plasma reactor with multiple top coils | Chi-Ching Lo, Po-Hsiung Leu, Ding-I Liu, Jen-Chi Chang, Ho-Ta Chuang | 2017-03-28 |