Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10864530 | Coating apparatus and method of forming coating film | Lan-Hai Wang, Ding-I Liu, Si-Wen Liao, Po-Hsiung Leu, Mao-Cheng Lin | 2020-12-15 |
| 10279056 | Lamp device, substrate cleaning apparatus and operation method thereof | Qing Tong, Weijing Liao | 2019-05-07 |
| 9766020 | Heat recovery device and alignment film curing system | Qing Tong, Weijing Liao | 2017-09-19 |
| 9631273 | Apparatus for dielectric deposition process | Lan-Hai Wang, Ding-I Liu, Si-Wen Liao, Po-Hsiung Leu | 2017-04-25 |
| 9573144 | Coating apparatus and method of forming coating film | Lan-Hai Wang, Ding-I Liu, Si-Wen Liao, Po-Hsiung Leu, Mao-Cheng Lin | 2017-02-21 |
| 9490152 | Asymmetrical chamber configuration | Lan-Hai Wang, Ding-I Liu, Si-Wen Liao, Jia-Wei Hsu | 2016-11-08 |
| 9324559 | Thin film deposition apparatus with multi chamber design and film deposition methods | Lan-Hai Wang, Ding-I Liu, Si-Wen Liao, Po-Hsiung Leu, Chia-Ming Tai | 2016-04-26 |