Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478444 | Mechanisms for cleaning wafer and scrubber | Tai-Liang Lyu, Shao-Yen Ku, Tzu-Yang Chung, Chao-Hui Kuo | 2016-10-25 |
| 9324559 | Thin film deposition apparatus with multi chamber design and film deposition methods | Lan-Hai Wang, Ding-I Liu, Si-Wen Liao, Po-Hsiung Leu, Yong-Hung Yang | 2016-04-26 |