Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10864530 | Coating apparatus and method of forming coating film | Lan-Hai Wang, Yong-Hung Yang, Ding-I Liu, Po-Hsiung Leu, Mao-Cheng Lin | 2020-12-15 |
| 10867787 | Method for controlling plasma in semiconductor fabrication | Cheng-Tsung Wu, Po-Hsiung Leu, Ding-I Liu, Hsiang-Sheng Kung | 2020-12-15 |
| 10724140 | Thermal chemical vapor deposition system and operating method thereof | Yen-Chan Lo, Yi-Fang Lai, Po-Hsiung Leu, Ding-I Liu, Kai-Shiung Hsu +4 more | 2020-07-28 |
| 10395918 | Method and system for controlling plasma in semiconductor fabrication | Cheng-Tsung Wu, Po-Hsiung Leu, Ding-I Liu, Hsiang-Sheng Kung | 2019-08-27 |
| 10161041 | Thermal chemical vapor deposition system and operating method thereof | Yen-Chan Lo, Yi-Fang Lai, Po-Hsiung Leu, Ding-I Liu, Kai-Shiung Hsu +4 more | 2018-12-25 |
| 9631273 | Apparatus for dielectric deposition process | Lan-Hai Wang, Ding-I Liu, Po-Hsiung Leu, Yong-Hung Yang | 2017-04-25 |
| 9607873 | Apparatus and operation method thereof | Jia Wei Xu, Mao-Cheng Lin, Chien-Cheng Wu, Lan-Hai Wang, Ding-I Liu +1 more | 2017-03-28 |
| 9573144 | Coating apparatus and method of forming coating film | Lan-Hai Wang, Yong-Hung Yang, Ding-I Liu, Po-Hsiung Leu, Mao-Cheng Lin | 2017-02-21 |
| 9490152 | Asymmetrical chamber configuration | Lan-Hai Wang, Ding-I Liu, Yong-Hung Yang, Jia-Wei Hsu | 2016-11-08 |
| 9324559 | Thin film deposition apparatus with multi chamber design and film deposition methods | Lan-Hai Wang, Ding-I Liu, Po-Hsiung Leu, Yong-Hung Yang, Chia-Ming Tai | 2016-04-26 |