Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6946397 | Chemical mechanical polishing process with reduced defects in a copper process | William Weilun Hong, Chia-Che CHUNG, Wen-Chih Chiou, Ying-Ho Chen, Syun-Ming Jang | 2005-09-20 |
| 6686284 | Chemical mechanical polisher equipped with chilled retaining ring and method of using | Tung-Ching Tseng, Tsu Shih, Syun-Ming Jang | 2004-02-03 |