Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635114 | High temperature filter for CVD apparatus | Jun Zhao, Charles Dornfest, Xiaoliang Jin, Po Tang | 2003-10-21 |
| 6358323 | Method and apparatus for improved control of process and purge material in a substrate processing system | John V. Schmitt, Xin Guo, Ling Chen, Christophe Marcadal | 2002-03-19 |
| 6258170 | Vaporization and deposition apparatus | Sasson Somekh, Jun Zhao, Charles Dornfest, Talex Sajoto, Leonid Selyutin +3 more | 2001-07-10 |
| 6210485 | Chemical vapor deposition vaporizer | Jun Zhao, Lee Luo, Xiaoliang Jin, Charles Dornfest, Po Tang | 2001-04-03 |
| 6096134 | Liquid delivery system | Jun Zhao, Charles Dornfest, Vincent Ku, Visweswaren Sivaramakrishnan | 2000-08-01 |
| 6082714 | Vaporization apparatus and process | Charles Dornfest, Jun Zhao, Vincent Ku, Po Tang, Talex Sajoto | 2000-07-04 |
| 5589003 | Shielded substrate support for processing chamber | Jun Zhao, Charles Dornfest | 1996-12-31 |