| 6635114 |
High temperature filter for CVD apparatus |
Jun Zhao, Charles Dornfest, Xiaoliang Jin, Po Tang |
2003-10-21 |
| 6358323 |
Method and apparatus for improved control of process and purge material in a substrate processing system |
John V. Schmitt, Xin Guo, Ling Chen, Christophe Marcadal |
2002-03-19 |
| 6258170 |
Vaporization and deposition apparatus |
Sasson Somekh, Jun Zhao, Charles Dornfest, Talex Sajoto, Leonid Selyutin +3 more |
2001-07-10 |
| 6210485 |
Chemical vapor deposition vaporizer |
Jun Zhao, Lee Luo, Xiaoliang Jin, Charles Dornfest, Po Tang |
2001-04-03 |
| 6096134 |
Liquid delivery system |
Jun Zhao, Charles Dornfest, Vincent Ku, Visweswaren Sivaramakrishnan |
2000-08-01 |
| 6082714 |
Vaporization apparatus and process |
Charles Dornfest, Jun Zhao, Vincent Ku, Po Tang, Talex Sajoto |
2000-07-04 |
| 5589003 |
Shielded substrate support for processing chamber |
Jun Zhao, Charles Dornfest |
1996-12-31 |
