Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7777483 | Method and apparatus for measuring a thickness of a layer of a wafer | Lawrence Chung-Lai Lei, Siqing Lu, Yu-Chia Chang, Quyen Pham, Yu Gu +3 more | 2010-08-17 |
| 7355394 | Apparatus and method of dynamically measuring thickness of a layer of a substrate | Lawrence Chung-Lai Lei, Siqing Lu, Yu-Chia Chang, Quyen Pham, Yu Gu +3 more | 2008-04-08 |
| 7112961 | Method and apparatus for dynamically measuring the thickness of an object | Lawrence Chung-Lai Lei, Siqing Lu, Yu-Chia Chang, Quyen Pham, Yu Gu +3 more | 2006-09-26 |