Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12315745 | Heater cover plate for uniformity improvement | Muhammad M. Rasheed | 2025-05-27 |
| 11853042 | Part, sensor, and metrology data integration | Garrett H. Sin, Sidharth Bhatia, Katty Marie Lydia Gamon Guyomard, Shawyon Jafari, Heng-Cheng Pai +2 more | 2023-12-26 |
| 11566327 | Methods and apparatus to reduce pressure fluctuations in an ampoule of a chemical delivery system | Muhammad M. Rasheed, Kenric Choi, Tatsuya Sato | 2023-01-31 |
| 11562914 | Heater cover plate for uniformity improvement | Muhammad M. Rasheed | 2023-01-24 |
| 10879090 | High temperature process chamber lid | Joel M. Huston, Dien-Yeh Wu, Chien-Teh Kao, Mei Chang | 2020-12-29 |
| 10519546 | Apparatus and method for providing a uniform flow of gas | Ravi Jallepally, Muhammad M. Rasheed | 2019-12-31 |
| 10167553 | Apparatus and method for providing a uniform flow of gas | Muhammad M. Rasheed, Ravi Jallepally | 2019-01-01 |
| 9914632 | Methods and apparatus for liquid chemical delivery | Muhammad M. Rasheed, Paul F. Ma | 2018-03-13 |
| 9831109 | High temperature process chamber lid | Joel M. Huston, Dien-Yeh Wu, Chien-Teh Kao, Mei Chang | 2017-11-28 |