Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11853042 | Part, sensor, and metrology data integration | Garrett H. Sin, Sidharth Bhatia, Shawyon Jafari, Heng-Cheng Pai, Pramod Nambiar +2 more | 2023-12-26 |
| 11848218 | Semiconductor chamber component cleaning systems | Chidambara A. Ramalingam, Shawyon Jafari, Palash Joshi, Moin Ahmed Khan, Kirubanandan Naina SHANMUGAM +5 more | 2023-12-19 |
| 11499229 | Substrate supports including metal-ceramic interfaces | Chidambara A. Ramalingam, Juan Carlos Rocha, Joseph M. Polese, Jian Li | 2022-11-15 |