Part, sensor, and metrology data integration

Assignee

• Applied Materials

Inventors

• Garrett H. Sin (17 patents)
• Sidharth Bhatia (26 patents)
• Katty Marie Lydia Gamon Guyomard (3 patents)
• Shawyon Jafari (6 patents)
• Heng-Cheng Pai (6 patents)
• Pramod Nambiar (6 patents)
• Paul Brillhart (59 patents)
• Ilker Durukan (9 patents)

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