Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12074010 | Atomic layer deposition part coating chamber | Michael R. Rice, Hanish Kumar Panavalappil Kumarankutty, Steven Marcus, Sriharsha DHARMAPURA SATHYANARAYANAMURTHY, Madhukar KRISHNA +3 more | 2024-08-27 |
| 11848218 | Semiconductor chamber component cleaning systems | Katty Marie Lydia Gamon Guyomard, Chidambara A. Ramalingam, Shawyon Jafari, Palash Joshi, Moin Ahmed Khan +5 more | 2023-12-19 |