Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12379280 | Method of measuring efficiency for optical devices | Jinxin FU, Yangyang SUN, Ludovic Godet | 2025-08-05 |
| 12236575 | In-line metrology systems, apparatus, and methods for optical devices | Yangyang SUN, Jinxin FU, Ludovic Godet | 2025-02-25 |
| 12229940 | In-line metrology systems, apparatus, and methods for optical devices | Yangyang SUN, Jinxin FU, Ludovic Godet | 2025-02-18 |
| 12230479 | Processing chamber with multiple plasma units | Yi Xu, Yu Lei, Takashi Kuratomi, Jallepally Ravi, Pingyan Lei +1 more | 2025-02-18 |
| 12152302 | Multiple-channel showerhead design and methods in manufacturing | Jallepally Ravi, Harpreet Singh | 2024-11-26 |
| 11988574 | Illumination system for AR metrology tool | Yangyang SUN, Jinxin FU, Ludovic Godet | 2024-05-21 |
| 11978196 | See-through metrology systems, apparatus, and methods for optical devices | Yangyang SUN, Jinxin FU, Ludovic Godet | 2024-05-07 |
| 11967525 | Selective tungsten deposition at low temperatures | Yi Xu, Yufei Hu, Yu Lei, Da He, Jiajie Cen | 2024-04-23 |
| 11955381 | Low-temperature plasma pre-clean for selective gap fill | Yi Xu, Yufei Hu, Geraldine VASQUEZ, Da He, Jallepally Ravi +2 more | 2024-04-09 |
| 11955319 | Processing chamber with multiple plasma units | Yi Xu, Yu Lei, Takashi Kuratomi, Jallepally Ravi, Pingyan Lei +1 more | 2024-04-09 |
| 11884076 | Fluid management system for inkjet machines | Daihua Zhang, Kang Luo, Elsa Massonneau, Alexey Stepanov, Ludovic Godet | 2024-01-30 |
| 11878532 | Inkjet platform for fabrication of optical films and structures | Daihua Zhang, Ludovic Godet, Michael David-Scott Kemp, Kang Luo, Kenneth S. Ledford +7 more | 2024-01-23 |
| 11807008 | Multifunctional printhead service station with multi-axis motions | Daihua Zhang, Kang Luo, Kenneth S. Ledford, Elsa Massonneau, Alexey Stepanov +5 more | 2023-11-07 |
| 11802791 | Optical device metrology systems and related methods | Jinxin FU, Ludovic Godet | 2023-10-31 |
| 11748875 | See-through metrology systems, apparatus, and methods for optical devices | Yangyang SUN, Jinxin FU, Ludovic Godet | 2023-09-05 |
| 11721542 | Dual plasma pre-clean for selective gap fill | Yi Xu, Yufei Hu, Yu Lei, Dien-Yeh Wu, Jallepally Ravi | 2023-08-08 |
| 11598003 | Substrate processing chamber having heated showerhead assembly | Faruk Gungor, Dien-Yeh Wu, Joel M. Huston, Mei Chang, Xiaoxiong Yuan +4 more | 2023-03-07 |
| 11515200 | Selective tungsten deposition within trench structures | Yi Xu, Yufei Hu, He Ren, Yu Lei, Shi YOU | 2022-11-29 |
| 11421322 | Blocker plate for use in a substrate process chamber | Xiaoxiong Yuan, Yu Lei, Yi Xu, Pingyan Lei, Dien-Yeh Wu +2 more | 2022-08-23 |
| 11404313 | Selective tungsten deposition at low temperatures | Yi Xu, Yufei Hu, Yu Lei, Da He, Jiajie Cen | 2022-08-02 |
| 11355391 | Method for forming a metal gapfill | Xi Cen, Feiyue Ma, Kai Wu, Yu Lei, Yi Xu +13 more | 2022-06-07 |
| 11062900 | Method of reducing effective oxide thickness in a semiconductor structure | Luping Li, Shih Chung Chen, Lin Dong, Zhebo Chen, Yixiong Yang +1 more | 2021-07-13 |
| 10793951 | Apparatus to improve substrate temperature uniformity | Gwo-Chuan Tzu, Sang-Hyeob Lee | 2020-10-06 |
| 10620031 | System for measuring level of a precursor in a container | Vijay Venugopal | 2020-04-14 |
| 10535527 | Methods for depositing semiconductor films | Yi Xu, Takashi Kuratomi, Avgerinos V. Gelatos, Vikash Banthia, Mei Chang | 2020-01-14 |