Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406884 | Self field-suppression CVD tungsten (W) fill on PVD W liner | Zhimin QI, Yi Xu, Shirish A. PETHE, Xingyao GAO, Shiyu YUE +5 more | 2025-09-02 |
| 12191200 | Methods for minimizing feature-to-feature gap fill height variations | Jiajie Cen, Yi Xu, Yu Lei | 2025-01-07 |
| 11967525 | Selective tungsten deposition at low temperatures | Yi Xu, Yufei Hu, Yu Lei, Kazuya Daito, Jiajie Cen | 2024-04-23 |
| 11955381 | Low-temperature plasma pre-clean for selective gap fill | Yi Xu, Yufei Hu, Kazuya Daito, Geraldine VASQUEZ, Jallepally Ravi +2 more | 2024-04-09 |
| 11404313 | Selective tungsten deposition at low temperatures | Yi Xu, Yufei Hu, Yu Lei, Kazuya Daito, Jiajie Cen | 2022-08-02 |
| 8578372 | Business-in-a-box integration server and integration method | Jian Xu, Yi Zhen Xu | 2013-11-05 |