Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10508339 | Blocker plate for use in a substrate process chamber | Xiaoxiong Yuan, Yu Lei, Yi Xu, Pingyan Lei, Dien-Yeh Wu +2 more | 2019-12-17 |
| 9957615 | Apparatus to improve substrate temperature uniformity | Gwo-Chuan Tzu, Sang-Hyeob Lee | 2018-05-01 |
| 9947578 | Methods for forming low-resistance contacts through integrated process flow systems | Yu Lei, Vikash Banthia, Kai Wu, Xinyu Fu, Yi Xu +9 more | 2018-04-17 |
| 9653352 | Methods for forming metal organic tungsten for middle of the line (MOL) applications | Liqi Wu, Sang Ho Yu, Kie Jin Park, Kai Wu, David Thompson | 2017-05-16 |
| 9169556 | Tungsten growth modulation by controlling surface composition | Kai Wu, KieJin Park, Sang Ho Yu, Sang-Hyeob Lee, Joshua Collins +1 more | 2015-10-27 |
| 9162930 | PVD ALN film with oxygen doping for a low etch rate hardmask film | Yong Cao, Rajkumar Jakkaraju, Xianmin Tang | 2015-10-20 |