Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406849 | Methods and apparatus for enhancing selectivity of titanium and titanium silicides during chemical vapor deposition | Takashi Kuratomi, I-Cheng Chen, Avgerinos V. Gelatos, Mei Chang, Xianmin Tang | 2025-09-02 |
| 12230479 | Processing chamber with multiple plasma units | Kazuya Daito, Yi Xu, Yu Lei, Takashi Kuratomi, Jallepally Ravi +1 more | 2025-02-18 |
| 12016092 | Gas distribution ceramic heater for deposition chamber | Dien-Yeh Wu, Jallepally Ravi, Manjunatha Koppa, Ambarish Toorihal, Sandesh Yadamane +2 more | 2024-06-18 |
| 11955319 | Processing chamber with multiple plasma units | Kazuya Daito, Yi Xu, Yu Lei, Takashi Kuratomi, Jallepally Ravi +1 more | 2024-04-09 |
| 11658014 | Apparatuses and methods of protecting nickel and nickel containing components with thin films | Dien-Yeh Wu, Xiao-Ming He, Jennifer Y. Sun, Lei Zhou, Takashi Kuratomi +3 more | 2023-05-23 |
| 11555244 | High temperature dual chamber showerhead | Dien-Yeh Wu, Jallepally Ravi, Takashi Kuratomi, Xiaoxiong Yuan, Manjunatha Koppa +1 more | 2023-01-17 |
| 11430661 | Methods and apparatus for enhancing selectivity of titanium and titanium silicides during chemical vapor deposition | Takashi Kuratomi, I-Cheng Chen, Avgerinos V. Gelatos, Mei Chang, Xianmin Tang | 2022-08-30 |
| 11421322 | Blocker plate for use in a substrate process chamber | Xiaoxiong Yuan, Yu Lei, Yi Xu, Kazuya Daito, Dien-Yeh Wu +2 more | 2022-08-23 |
| 10508339 | Blocker plate for use in a substrate process chamber | Xiaoxiong Yuan, Yu Lei, Yi Xu, Kazuya Daito, Dien-Yeh Wu +2 more | 2019-12-17 |
| 9881787 | Deposition methods for uniform and conformal hybrid titanium oxide films | Chien-Teh Kao, Benjamin Schmiege, Xuesong Lu, Juno Yu-Ting Huang, Yu Lei +7 more | 2018-01-30 |