Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7705275 | Substrate support having brazed plates and resistance heater | Salvador P. Umotoy, Lawrence Chung-Lai Lei, Gwo-chun Tzu, Xiangxiong (John) Yuan, Michael S. Jackson | 2010-04-27 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7705275 | Substrate support having brazed plates and resistance heater | Salvador P. Umotoy, Lawrence Chung-Lai Lei, Gwo-chun Tzu, Xiangxiong (John) Yuan, Michael S. Jackson | 2010-04-27 |