Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6521292 | Substrate support including purge ring having inner edge aligned to wafer edge | Joseph Yudovsky, Salvador P. Umotoy | 2003-02-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6521292 | Substrate support including purge ring having inner edge aligned to wafer edge | Joseph Yudovsky, Salvador P. Umotoy | 2003-02-18 |