Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Apparatus for storing and moving a cassette

Apparatus for storing and moving a cassette

US Patent 6283692 · Granted Sep 4, 2001

Estimated economic value: $82,822,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Chemical mechanical polishing system having multiple polishing stations and prov2011
Apparatus for storing and moving a cassette2009
Apparatus for storing and moving a cassette2009
Apparatus for storing and moving a cassette2009
Chemical mechanical polishing system having multiple polishing stations and prov2009
Load port configurations for small lot size substrate carriers2009
Chemical mechanical polishing system having multiple polishing stations and prov2007
Polishing apparatus having a trough2007
Chemical mechanical polishing system having multiple polishing stations and prov2006
Method of controlling carrier head with multiple chambers2005
Carrier head with a flexible membrane to form multiple chambers2003
Method and apparatus for improved substrate handling2003