Combined slurry dispenser and rinse arm

Assignee

• Applied Materials

Inventors

• Daniel F. Kennedy (8 patents)
• Boris Fuksshimov (3 patents)
• Victor Belitsky (8 patents)
• Boris Fishkin (39 patents)
• Unknown
• Tom Osterheld (3 patents)
• Jeff BEELER (3 patents)
• Ginetto Addiego (7 patents)

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