Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5931724 | Mechanical fastener to hold a polishing pad on a platen in a chemical mechanical polishing system | Ilya Perlov | 1999-08-03 |
| 5893795 | Apparatus for moving a cassette | Ilya Perlov | 1999-04-13 |
| 5804507 | Radially oscillating carousel processing system for chemical mechanical polishing | Ilya Perlov, Harry Q. Lee, Sasson Somekh, Robert D. Tolles | 1998-09-08 |
| 5738574 | Continuous processing system for chemical mechanical polishing | Robert D. Tolles, Norm Shendon, Sasson Somekh, Ilya Perlov, Harry Q. Lee | 1998-04-14 |