Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › End point detection for sputtering and resputtering

End point detection for sputtering and resputtering

US Patent 7048837 · Granted May 23, 2006

Estimated economic value: $10,996,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and system for dynamic stability control of power systems with renewable 2025
Rating substrate support assemblies based on impedance circuit electron flow usi2025
Symmetric plasma source to generate pie-shaped treatment2024
Metal oxide preclean chamber with improved selectivity and flow conductance2024
Smart dynamic load simulator for RF power delivery control system2024
Submodule hybrid MMC with low full-bridge ratio and DC fault processing method t2024
Resistive sub-module hybrid MMC and direct current fault processing strategy the2024
Distributed voltage clamping method for 100% renewable-energy sending-end grid2024
Cleaning of SIN with CCP plasma or RPS clean2024
Printing a chemical mechanical polishing pad2024
High temperature detachable very high frequency (VHF) electrostatic chuck (ESC) 2024
Offshore wind farm low-frequency alternating-current uncontrolled rectification 2024