Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5484011 | Method of heating and cooling a wafer during semiconductor processing | Avi Tepman, Howard Grunes | 1996-01-16 |
| 5228501 | Physical vapor deposition clamping mechanism and heater/cooler | Avi Tepman, Howard Grunes | 1993-07-20 |
| 5226632 | Slit valve apparatus and method | Avi Tepman | 1993-07-13 |
| 5215619 | Magnetic field-enhanced plasma etch reactor | David Cheng, Dan Maydan, Sasson Somekh, Kenneth R. Stalder, Mei Chang +4 more | 1993-06-01 |
| 4842683 | Magnetic field-enhanced plasma etch reactor | David Cheng, Dan Maydan, Sasson Somekh, Kenneth R. Stalder, Mei Chang +4 more | 1989-06-27 |