Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5447409 | Robot assembly | Avi Tepman, Robert B. Lowrance | 1995-09-05 |
| 5387067 | Direct load/unload semiconductor wafer cassette apparatus and transfer system | — | 1995-02-07 |
| 5228501 | Physical vapor deposition clamping mechanism and heater/cooler | Avi Tepman, Dana L. Andrews | 1993-07-20 |
| 5186718 | Staged-vacuum wafer processing system and method | Avi Tepman, Sasson Somekh, Dan Maydan | 1993-02-16 |
| 4393663 | Two-phase thermosyphon heater | Dennis J. Morrison | 1983-07-19 |