Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7777152 | High AC current high RF power AC-RF decoupling filter for plasma reactor heated electrostatic chuck | Valentin Todorov, Michael D. Willwerth, Alexander Paterson, Brian K. Hatcher, John Holland | 2010-08-17 |
| 6178920 | Plasma reactor with internal inductive antenna capable of generating helicon wave | Yan Ye, Allan D'Ambra, Yeuk-Fai Edwin Mok, Richard E. Remington | 2001-01-30 |
| 6158384 | Plasma reactor with multiple small internal inductive antennas | Yan Ye, Allan D'Ambra, Yeuk-Fai Edwin Mok, Richard E. Remmington | 2000-12-12 |
| 6068020 | Gas line safety device | John P. Gancel | 2000-05-30 |
| 5856906 | Backside gas quick dump apparatus for a semiconductor wafer processing system | Arnold Kholodenko, Maya Shendon, Gary Hsueh | 1999-01-05 |