Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6015465 | Temperature control system for semiconductor process chamber | Arnold Kholodenko, Ke Ling Lee, Efrain Quiles | 2000-01-18 |
| 5856906 | Backside gas quick dump apparatus for a semiconductor wafer processing system | Arnold Kholodenko, Gary Hsueh, James E. Sammons, III | 1999-01-05 |
| 5292399 | Plasma etching apparatus with conductive means for inhibiting arcing | Terrance Y. Lee, Fred C. Redeker, Petru N. Nitescu, Robert Steger, David W. Groechel +2 more | 1994-03-08 |