Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5641375 | Plasma etching reactor with surface protection means against erosion of walls | Hoan Nguyen | 1997-06-24 |
| 5462080 | Heated removable throttle valve | Richard W. Plavidal, Greg Mudwilder, Richard H. Crockett | 1995-10-31 |
| 5348497 | High voltage vaccum feed-through electrical connector | — | 1994-09-20 |
| 5292399 | Plasma etching apparatus with conductive means for inhibiting arcing | Terrance Y. Lee, Fred C. Redeker, Robert Steger, David W. Groechel, Semyon Sherstinsky +2 more | 1994-03-08 |
| 4813840 | Method of aligning wafers and device therefor | Rakesh Prabhakar, A. Fernando Benavides, Peter Ebbing | 1989-03-21 |