Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5462080 | Heated removable throttle valve | Richard W. Plavidal, Petru N. Nitescu, Greg Mudwilder | 1995-10-31 |
| 5443997 | Method for transferring heat to or from a semiconductor wafer using a portion of a process gas | Chiu-Wing Tsui | 1995-08-22 |
| 5248370 | Apparatus for heating and cooling semiconductor wafers in semiconductor wafer processing equipment | Chiu-Wing Tsui | 1993-09-28 |