Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8771423 | Low sloped edge ring for plasma processing chamber | Changhun Lee, Michael D. Willwerth | 2014-07-08 |
| 5641375 | Plasma etching reactor with surface protection means against erosion of walls | Petru N. Nitescu | 1997-06-24 |