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Home › Method and apparatus for thermal control of a semiconductor substrate

Method and apparatus for thermal control of a semiconductor substrate

US Patent 6466426 · Granted Oct 15, 2002

Estimated economic value: $18,888,000 ⓘ

Assignee

Applied Materials

Inventors

Yeuk-Fai Edwin Mok (12 patents)
Dmitry Lubomirsky (223 patents)
Dennis Koosau (4 patents)
Danny D. WANG (6 patents)
Senh Thach (34 patents)
Paul Exline (1 patents)

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