Metal oxide resist patterning with electrical field guided post-exposure bake

Assignee

• Applied Materials

Inventors

• Huixiong Dai (44 patents)
• Mangesh Ashok BANGAR (11 patents)
• Srinivas D. Nemani (236 patents)
• Steven Hiloong WELCH (6 patents)
• Ellie Yieh (178 patents)
• Dmitry Lubomirsky (223 patents)

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