Patents per Year
Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 9932670 | Method of decontamination of process chamber after in-situ chamber clean | Jie Su, Lori D. Washington, Sandeep Nijhawan, Olga Kryliouk, Sang Won Kang +2 more | 2018-04-03 | $60,753,000 |
| 9644267 | Multi-gas straight channel showerhead | Brian H. Burrows, Alexander Tam, Ronald Stevens, Kenric Choi, James D. Felsch +4 more | 2017-05-09 | $25,128,000 |
| 8481118 | Multi-gas straight channel showerhead | Brian H. Burrows, Alexander Tam, Ronald Stevens, Kenric Choi, James D. Felsch +4 more | 2013-07-09 | $18,699,000 |
| 7976631 | Multi-gas straight channel showerhead | Brian H. Burrows, Alexander Tam, Ronald Stevens, Kenric Choi, James D. Felsch +4 more | 2011-07-12 | $5,718,000 |