Issued Patents All Time
Showing 26–50 of 99 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9793132 | Etch mask for hybrid laser scribing and plasma etch wafer singulation process | Wenguang Li, James S. Papanu, Ramesh Krishnamurthy, Prabhat Kumar, Brad Eaton +1 more | 2017-10-17 |
| 9794298 | Method, system, and computer program product for facilitating communication in an interoperability network | Michael Dewey | 2017-10-17 |
| 9674226 | Synchronous interface to asynchronous processes | Taras Shkvarchuk, Thomas Nabiel Boulos | 2017-06-06 |
| 9564349 | Rapid thermal processing chamber with micro-positioning system | Khurshed Sorabji, Joseph M. Ranish, Wolfgang Aderhold, Aaron Muir Hunter, Blake Koelmel +1 more | 2017-02-07 |
| 9478455 | Thermal pyrolytic graphite shadow ring assembly for heat dissipation in plasma chamber | Alan Ouye | 2016-10-25 |
| 9473536 | Method, system, and computer program product for facilitating communication in an interoperability network | Michael Dewey | 2016-10-18 |
| 9449858 | Transparent reflector plate for rapid thermal processing chamber | Blake Koelmel, Aaron Muir Hunter | 2016-09-20 |
| 9390950 | Rapid thermal processing chamber with micro-positioning system | Khurshed Sorabji, Joseph M. Ranish, Wolfgang Aderhold, Aaron Muir Hunter, Blake Koelmel +1 more | 2016-07-12 |
| 9337014 | Processing system architecture with single load lock chamber | Vladimir Galburt, Brian P. Brown | 2016-05-10 |
| 9212422 | CVD reactor with gas flow virtual walls | Gregg Higashi, Khurshed Sorabji, Lori D. Washington | 2015-12-15 |
| 9209049 | Rapid conductive cooling using a secondary process plane | Khurshed Sorabji | 2015-12-08 |
| 9165832 | Method of die singulation using laser ablation and induction of internal defects with a laser | James S. Papanu, Wei-Sheng Lei, Jungrae Park, Brad Eaton, Ajay Kumar | 2015-10-20 |
| 9032023 | Synchronous interface to asynchronous processes | Taras Shkvarchuk, Thomas Nabiel Boulos | 2015-05-12 |
| 8966577 | Method, system, and computer program product for facilitating communication in an interoperability network | Michael Dewey | 2015-02-24 |
| 8900889 | Rapid thermal processing chamber with micro-positioning system | Khurshed Sorabji, Joseph M. Ranish, Wolfgang Aderhold, Aaron Muir Hunter, Blake Koelmel +1 more | 2014-12-02 |
| 8888916 | Thermal reactor with improved gas flow distribution | Ming-Kuei Tseng, Norman L. Tam, Yoshitaka Yokota, Agus Sofian Tjandra, Robert Navasca +3 more | 2014-11-18 |
| 8698049 | Rapid thermal processing lamphead with improved cooling | Joseph M. Ranish, Khurshed Sorabji, Kedarnath Sangam | 2014-04-15 |
| 8698048 | High temperature vacuum chuck assembly | Blake Koelmel, Mehran Behdjat | 2014-04-15 |
| 8658947 | Rapid conductive cooling using a secondary process plane | Khurshed Sorabji | 2014-02-25 |
| 8608853 | Thermal reactor with improved gas flow distribution | Ming-Kuei Tseng, Norman L. Tam, Yoshitaka Yokota, Agus Sofian Tjandra, Robert Navasca +3 more | 2013-12-17 |
| 8590006 | Method, system, and computer program product for facilitating communication in an interoperability network | Michael Dewey | 2013-11-19 |
| 8522306 | System, method and computer program product for implementing at least one policy for facilitating communication among a plurality of entities | Michael Dewey | 2013-08-27 |
| 8516540 | Method, system, and computer program product for facilitating communication in an interoperability network | Michael Dewey | 2013-08-20 |
| 8516541 | Method, system, and computer program product for network authorization | Michael Dewey | 2013-08-20 |
| 8516542 | Method, system, and computer program product for facilitating communication in an interoperability network | Michael Dewey | 2013-08-20 |