| 10725722 |
Modular multiple display electronic devices |
Craig C. Leong |
2020-07-28 |
$157,336,000 |
| 10483145 |
Wafer edge measurement and control |
— |
2019-11-19 |
$24,323,000 |
| 10074555 |
Non-contact substrate processing |
Nyi O. Myo |
2018-09-11 |
$27,448,000 |
| 9786537 |
Wafer edge measurement and control |
— |
2017-10-10 |
$63,139,000 |
| 9640412 |
Apparatus and method for enhancing the cool down of radiatively heated substrates |
Wolfgang Aderhold, Joseph M. Ranish |
2017-05-02 |
$24,975,000 |
| 9564349 |
Rapid thermal processing chamber with micro-positioning system |
Khurshed Sorabji, Joseph M. Ranish, Wolfgang Aderhold, Aaron Muir Hunter, Alexander Lerner +1 more |
2017-02-07 |
$24,536,000 |
| 9552989 |
Apparatus and method for improved control of heating and cooling of substrates |
Norman L. Tam, Joseph M. Ranish |
2017-01-24 |
$20,961,000 |
| 9449858 |
Transparent reflector plate for rapid thermal processing chamber |
Aaron Muir Hunter, Alexander Lerner |
2016-09-20 |
$12,933,000 |
| 9390950 |
Rapid thermal processing chamber with micro-positioning system |
Khurshed Sorabji, Joseph M. Ranish, Wolfgang Aderhold, Aaron Muir Hunter, Alexander Lerner +1 more |
2016-07-12 |
$13,832,000 |
| 9245786 |
Apparatus and methods for positioning a substrate using capacitive sensors |
Joseph M. Ranish, Errol C. Sanchez |
2016-01-26 |
$7,094,000 |
| 9130001 |
Edge ring for a thermal processing chamber |
Joseph M. Ranish, Abhilash J. Mayur |
2015-09-08 |
$6,271,000 |
| 9076828 |
Edge ring for a thermal processing chamber |
Joseph M. Ranish, Abhilash J. Mayur |
2015-07-07 |
$12,656,000 |
| 8939760 |
Spike anneal residence time reduction in rapid thermal processing chambers |
Jiping Li, Aaron Muir Hunter, Wolfgang Aderhold |
2015-01-27 |
$30,300,000 |
| 8900889 |
Rapid thermal processing chamber with micro-positioning system |
Khurshed Sorabji, Joseph M. Ranish, Wolfgang Aderhold, Aaron Muir Hunter, Alexander Lerner +1 more |
2014-12-02 |
$13,777,000 |
| 8865602 |
Edge ring lip |
Joseph M. Ranish, Wolfgang Aderhold, Ilya Lavitsky |
2014-10-21 |
$32,207,000 |
| 8761587 |
Apparatus and method for measuring radiation energy during thermal processing |
Joseph M. Ranish, Aaron Muir Hunter |
2014-06-24 |
$13,917,000 |
| 8755680 |
Edge ring for a thermal processing chamber |
Joseph M. Ranish, Abhilash J. Mayur |
2014-06-17 |
$19,996,000 |
| 8744250 |
Edge ring for a thermal processing chamber |
Joseph M. Ranish, Abhilash J. Mayur |
2014-06-03 |
$21,001,000 |
| 8698048 |
High temperature vacuum chuck assembly |
Alexander Lerner, Mehran Behdjat |
2014-04-15 |
$21,336,000 |
| 8548311 |
Apparatus and method for improved control of heating and cooling of substrates |
Norman L. Tam, Joseph M. Ranish |
2013-10-01 |
$12,396,000 |
| 8490660 |
Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber |
Alexander Lerner, Joseph M. Ranish, Kedarnath Sangam, Khurshed Sorabji |
2013-07-23 |
$9,121,000 |
| 8461022 |
Methods and apparatus for aligning a substrate in a process chamber |
Bruce E. Adams, Theodore P. Moffitt |
2013-06-11 |
$13,536,000 |
| 8452166 |
Apparatus and method for measuring radiation energy during thermal processing |
Joseph M. Ranish, Aaron Muir Hunter |
2013-05-28 |
$16,481,000 |
| 8434937 |
Method and apparatus for detecting the substrate temperature in a laser anneal system |
Abhilash J. Mayur |
2013-05-07 |
$10,477,000 |
| 8388853 |
Non-contact substrate processing |
Nyi O. Myo |
2013-03-05 |
$7,679,000 |
