Issued Patents All Time
Showing 25 most recent of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10725722 | Modular multiple display electronic devices | Craig C. Leong | 2020-07-28 |
| 10483145 | Wafer edge measurement and control | — | 2019-11-19 |
| 10074555 | Non-contact substrate processing | Nyi O. Myo | 2018-09-11 |
| 9786537 | Wafer edge measurement and control | — | 2017-10-10 |
| 9640412 | Apparatus and method for enhancing the cool down of radiatively heated substrates | Wolfgang Aderhold, Joseph M. Ranish | 2017-05-02 |
| 9564349 | Rapid thermal processing chamber with micro-positioning system | Khurshed Sorabji, Joseph M. Ranish, Wolfgang Aderhold, Aaron Muir Hunter, Alexander Lerner +1 more | 2017-02-07 |
| 9552989 | Apparatus and method for improved control of heating and cooling of substrates | Norman L. Tam, Joseph M. Ranish | 2017-01-24 |
| 9449858 | Transparent reflector plate for rapid thermal processing chamber | Aaron Muir Hunter, Alexander Lerner | 2016-09-20 |
| 9390950 | Rapid thermal processing chamber with micro-positioning system | Khurshed Sorabji, Joseph M. Ranish, Wolfgang Aderhold, Aaron Muir Hunter, Alexander Lerner +1 more | 2016-07-12 |
| 9245786 | Apparatus and methods for positioning a substrate using capacitive sensors | Joseph M. Ranish, Errol C. Sanchez | 2016-01-26 |
| 9130001 | Edge ring for a thermal processing chamber | Joseph M. Ranish, Abhilash J. Mayur | 2015-09-08 |
| 9076828 | Edge ring for a thermal processing chamber | Joseph M. Ranish, Abhilash J. Mayur | 2015-07-07 |
| 8939760 | Spike anneal residence time reduction in rapid thermal processing chambers | Jiping Li, Aaron Muir Hunter, Wolfgang Aderhold | 2015-01-27 |
| 8900889 | Rapid thermal processing chamber with micro-positioning system | Khurshed Sorabji, Joseph M. Ranish, Wolfgang Aderhold, Aaron Muir Hunter, Alexander Lerner +1 more | 2014-12-02 |
| 8865602 | Edge ring lip | Joseph M. Ranish, Wolfgang Aderhold, Ilya Lavitsky | 2014-10-21 |
| 8761587 | Apparatus and method for measuring radiation energy during thermal processing | Joseph M. Ranish, Aaron Muir Hunter | 2014-06-24 |
| 8755680 | Edge ring for a thermal processing chamber | Joseph M. Ranish, Abhilash J. Mayur | 2014-06-17 |
| 8744250 | Edge ring for a thermal processing chamber | Joseph M. Ranish, Abhilash J. Mayur | 2014-06-03 |
| 8698048 | High temperature vacuum chuck assembly | Alexander Lerner, Mehran Behdjat | 2014-04-15 |
| 8548311 | Apparatus and method for improved control of heating and cooling of substrates | Norman L. Tam, Joseph M. Ranish | 2013-10-01 |
| 8490660 | Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber | Alexander Lerner, Joseph M. Ranish, Kedarnath Sangam, Khurshed Sorabji | 2013-07-23 |
| 8461022 | Methods and apparatus for aligning a substrate in a process chamber | Bruce E. Adams, Theodore P. Moffitt | 2013-06-11 |
| 8452166 | Apparatus and method for measuring radiation energy during thermal processing | Joseph M. Ranish, Aaron Muir Hunter | 2013-05-28 |
| 8434937 | Method and apparatus for detecting the substrate temperature in a laser anneal system | Abhilash J. Mayur | 2013-05-07 |
| 8388853 | Non-contact substrate processing | Nyi O. Myo | 2013-03-05 |