Issued Patents All Time
Showing 26–36 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8367983 | Apparatus including heating source reflective filter for pyrometry | Joseph M. Ranish, Aaron Muir Hunter, Bruce E. Adams | 2013-02-05 |
| 8314371 | Rapid thermal processing chamber with micro-positioning system | Khurshed Sorabji, Joseph M. Ranish, Wolfgang Aderhold, Aaron Muir Hunter, Alexander Lerner +1 more | 2012-11-20 |
| 8309475 | Apparatus and method of aligning and positioning a cold substrate on a hot surface | Abhilash J. Mayur, Kai Ma, Alexander Lerner | 2012-11-13 |
| 8283607 | Apparatus including heating source reflective filter for pyrometry | Joseph M. Ranish, Aaron Muir Hunter | 2012-10-09 |
| 8198567 | High temperature vacuum chuck assembly | Alexander Lerner, Mehran Behdjat | 2012-06-12 |
| 8097543 | Apparatus and method of aligning and positioning a cold substrate on a hot surface | Abhilash J. Mayur, Kai Ma, Alexander Lerner | 2012-01-17 |
| 8057601 | Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber | Alexander Lerner, Joseph M. Ranish, Kedarnath Sangam, Khurshed Sorabji | 2011-11-15 |
| 8057602 | Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber | Alexander Lerner, Joseph M. Ranish, Kedarnath Sangam, Khurshed Sorabji | 2011-11-15 |
| 7985945 | Method for reducing stray light in a rapid thermal processing chamber by polarization | Joseph M. Ranish, Aaron Muir Hunter | 2011-07-26 |
| 7923280 | Millisecond annealing (DSA) edge protection | Robert C. McIntosh, David D L Larmagnac, Alexander Lerner, Abhilash J. Mayur, Joseph Yudovsky | 2011-04-12 |
| 7754518 | Millisecond annealing (DSA) edge protection | Robert C. McIntosh, David D L Larmagnac, Alexander Lerner, Abhilash J. Mayur, Joseph Yudovsky | 2010-07-13 |