Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 8888916 | Thermal reactor with improved gas flow distribution | Ming-Kuei Tseng, Norman L. Tam, Yoshitaka Yokota, Agus Sofian Tjandra, Mehran Behdjat +3 more | 2014-11-18 | $27,822,000 |
| 8608853 | Thermal reactor with improved gas flow distribution | Ming-Kuei Tseng, Norman L. Tam, Yoshitaka Yokota, Agus Sofian Tjandra, Mehran Behdjat +3 more | 2013-12-17 | $19,424,000 |
| 8056500 | Thermal reactor with improved gas flow distribution | Ming-Kuei Tseng, Norman L. Tam, Yoshitaka Yokota, Agus Sofian Tjandra, Mehran Behdjat +3 more | 2011-11-15 | $11,864,000 |
| 6523563 | Modular gas panel closet for a semiconductor wafer processing platform | Thomas Cho, Tetsuya Ishikawa | 2003-02-25 | $21,067,000 |