| 12251788 |
Polishing head with local wafer pressure |
Andrew J. Nagengast, Steven M. Zuniga, Jay Gurusamy, Charles C. Garretson |
2025-03-18 |
| 11986923 |
Polishing head with local wafer pressure |
Andrew J. Nagengast, Steven M. Zuniga, Jay Gurusamy, Charles C. Garretson |
2024-05-21 |
| 11780049 |
Polishing carrier head with multiple angular pressurizable zones |
Steven M. Zuniga, Jay Gurusamy, Andrew J. Nagengast |
2023-10-10 |
| 9337014 |
Processing system architecture with single load lock chamber |
Alexander Lerner, Brian P. Brown |
2016-05-10 |
| 7709382 |
Electroprocessing profile control |
Antoine P. Manens, Yan Wang, Alain Duboust, Donald Olgado, Liang-Yuh Chen |
2010-05-04 |
| 7655565 |
Electroprocessing profile control |
Antoine P. Manens, Yan Wang, Alain Duboust, Donald Olgado, Liang-Yuh Chen |
2010-02-02 |
| 7507296 |
Methods and apparatus for determining scrubber brush pressure |
Michael Sugarman |
2009-03-24 |
| 7229504 |
Methods and apparatus for determining scrubber brush pressure |
Michael Sugarman |
2007-06-12 |
| 6986185 |
Methods and apparatus for determining scrubber brush pressure |
Michael Sugarman |
2006-01-17 |
