Issued Patents All Time
Showing 76–99 of 99 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8057602 | Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber | Blake Koelmel, Joseph M. Ranish, Kedarnath Sangam, Khurshed Sorabji | 2011-11-15 |
| 7980255 | Single wafer dryer and drying methods | Younes Achkire, Boris Govzman, Boris Fishkin, Michael Sugarman, Rashid Mavleiv +4 more | 2011-07-19 |
| 7933009 | Method and apparatus for verifying proper substrate positioning | Oleg V. Serebryanov, Aaron Muir Hunter, Joseph M. Ranish | 2011-04-26 |
| 7923280 | Millisecond annealing (DSA) edge protection | Blake Koelmel, Robert C. McIntosh, David D L Larmagnac, Abhilash J. Mayur, Joseph Yudovsky | 2011-04-12 |
| 7923660 | Pulsed laser anneal system architecture | Timothy N. Thomas, Sundar Ramamurthy | 2011-04-12 |
| 7812286 | Rapid conductive cooling using a secondary process plane | Khurshed Sorabji | 2010-10-12 |
| 7754518 | Millisecond annealing (DSA) edge protection | Blake Koelmel, Robert C. McIntosh, David D L Larmagnac, Abhilash J. Mayur, Joseph Yudovsky | 2010-07-13 |
| 7739351 | Synchronous interface to asynchronous processes | Taras Shkvarchuk, Thomas Nabiel Boulos | 2010-06-15 |
| 7520939 | Integrated bevel clean chamber | Henry Ho, Lily Pang, Anh N. Nguyen | 2009-04-21 |
| 7513062 | Single wafer dryer and drying methods | Younes Achkire, Boris Govzman, Boris Fishkin, Michael Sugarman, Rashid Mavliev +4 more | 2009-04-07 |
| 7378618 | Rapid conductive cooling using a secondary process plane | Khurshed Sorabji | 2008-05-27 |
| 7256132 | Substrate centering apparatus and method | Avi Tepman, Donald Olgato | 2007-08-14 |
| 7223323 | Multi-chemistry plating system | Michael Yang, Ming Xi, Russell C. Ellwanger, Eric Bramwell Britcher, Bernardo Donoso +11 more | 2007-05-29 |
| 6955516 | Single wafer dryer and drying methods | Younes Achkire, Boris Govzman, Boris Fishkin, Michael Sugarman, Rashid Mavliev +4 more | 2005-10-18 |
| 6918864 | Roller that avoids substrate slippage | Brian J. Brown, Michael Sugarman, Makoto Inagawa, Daniel Ramar | 2005-07-19 |
| 6865937 | Deionized water spray on loss of fluid processing tank exhaust | Harshad Borgaonkar | 2005-03-15 |
| 6736408 | Rotary vacuum-chuck with venturi formed at base of rotating shaft | Donald Olgado, Bernardo Donoso | 2004-05-18 |
| 6728989 | Labyrinth seal for bearing in brush mounting assembly for semiconductor wafer scrubber | John M. White, Shou-Sang Chang, Michael Sugarman | 2004-05-04 |
| 6725869 | Protective barrier for cleaning chamber | John M. White | 2004-04-27 |
| 6720263 | Planarization of metal layers on a semiconductor wafer through non-contact de-plating and control with endpoint detection | Donald Olgado, Joseph Stevens | 2004-04-13 |
| 6634650 | Rotary vacuum-chuck with water-assisted labyrinth seal | — | 2003-10-21 |
| 6464799 | Method for managing a fluid level associated with a substrate processing tank | Brian J. Brown, Boris Fishkin, Jonathan Frankel | 2002-10-15 |
| 6460551 | Megasonic resonator for disk cleaning and method for use thereof | Boris Fishkin, Jianshe Tang, Brian J. Brown | 2002-10-08 |
| 6412503 | Magnetically coupled substrate roller | Manoocher Birang | 2002-07-02 |