Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11317501 | Method of purifying target material for an EUV light source | Georgiy O. Vaschenko, Peter Michael Baumgart, Chirag Rajyaguru, Benjamin Andrew Sams, Janine Kardokus | 2022-04-26 |
| 10632505 | System method and apparatus for high pressure liquid jet cleaning of sintered filters | Georgiy O. Vaschenko, Chirag Rajyaguru, Peter Michael Baumgart, Timothy Richard Palmer | 2020-04-28 |
| 10455680 | Method and apparatus for purifying target material for EUV light source | Georgiy O. Vaschenko, Peter Michael Baumgart, Chirag Rajyaguru, Benjamin Andrew Sams, Janine Kardokus | 2019-10-22 |
| 10149374 | Receptacle for capturing material that travels on a material path | Kyle John Scaffidi, Michael Arthur Perry, Jr. | 2018-12-04 |