Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12197140 | Substrate table, immersion lithographic apparatus and device manufacturing method | Marco Koert Stavenga, Sergei Shulepov, Koen Steffens, Samuel Bertrand Dominique David, David Bessems | 2025-01-14 |
| 11215933 | Substrate table, immersion lithographic apparatus and device manufacturing method | Marco Koert Stavenga, Sergei Shulepov, Koen Steffens, Samuel Bertrand Dominique David, David Bessems | 2022-01-04 |
| 10451980 | Substrate table, immersion lithographic apparatus and device manufacturing method | Marco Koert Stavenga, Sergei Shulepov, Koen Steffens, Samuel Bertrand Dominique David, David Bessems | 2019-10-22 |
| 9059228 | Substrate table, immersion lithographic apparatus and device manufacturing method | Marco Koert Stavenga, Sergei Shulepov, Koen Steffens, Samuel Bertrand Dominique David, David Bessems | 2015-06-16 |
| 8472003 | Fluid handling structure, lithographic apparatus and device manufacturing method | Hrishikesh Patel, Johannes Henricus Wilhelmus Jacobs, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons +11 more | 2013-06-25 |