Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12197140 | Substrate table, immersion lithographic apparatus and device manufacturing method | Marco Koert Stavenga, Sergei Shulepov, Koen Steffens, Matheus Anna Karel Van Lierop, David Bessems | 2025-01-14 |
| 11215933 | Substrate table, immersion lithographic apparatus and device manufacturing method | Marco Koert Stavenga, Sergei Shulepov, Koen Steffens, Matheus Anna Karel Van Lierop, David Bessems | 2022-01-04 |
| 10451980 | Substrate table, immersion lithographic apparatus and device manufacturing method | Marco Koert Stavenga, Sergei Shulepov, Koen Steffens, Matheus Anna Karel Van Lierop, David Bessems | 2019-10-22 |
| 9625833 | Substrate table, immersion lithographic apparatus and device manufacturing method | Marco Koert Stavenga, Sergei Shulepov, Koen Steffens, Mathieus Anna Karel Van Lierop, David Bessems | 2017-04-18 |
| 9059228 | Substrate table, immersion lithographic apparatus and device manufacturing method | Marco Koert Stavenga, Sergei Shulepov, Koen Steffens, Matheus Anna Karel Van Lierop, David Bessems | 2015-06-16 |