Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12072635 | Lithographic apparatus and a method of operating the apparatus | Christian Gerardus Norbertus Hendricus Marie Cloin, Nicolaas Ten Kate, Nicolaas Rudolf Kemper, Marco Koert Stavenga, Erik Henricus Egidius Catharina Eummelen +3 more | 2024-08-27 |
| 11187991 | Lithographic apparatus and a method of operating the apparatus | Christian Gerardus Norbertus Hendricus Marie Cloin, Nicolaas Ten Kate, Nicolaas Rudolf Kemper, Marco Koert Stavenga, Erik Henricus Egidius Catharina Eummelen +3 more | 2021-11-30 |
| 9176393 | Lithographic apparatus and a method of operating the apparatus | Christian Gerardus Norbertus Hendricus Marie Cloin, Nicolaas Ten Kate, Nicolaas Rudolf Kemper, Marco Koert Stavenga, Erik Henricus Egidius Catharina Eummelen +3 more | 2015-11-03 |
| 8508712 | Fluid handling structure, lithographic apparatus and device manufacturing method | Clemens Johannes Gerardus Van Den Dungen, Danny Maria Hubertus Philips, Koen Steffens, David Bessems | 2013-08-13 |