Issued Patents All Time
Showing 26–36 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9588437 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Rogier Hendrikus Magdalena Cortie, Nicolaas Ten Kate, Niek Jacobus Johannes Roset, Michel Riepen, Henricus Jozef Castelijns +1 more | 2017-03-07 |
| 9563132 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | David Bessems, Erik Henricus Egidius Catharina Eummelen, Michel Riepen, Rogier Hendrikus Magdalena Cortie, Adrianes Johannes Baeten | 2017-02-07 |
| 9442390 | Fluid handling structure including gas supply and gas recovery openings, a lithographic apparatus and a device manufacturing method | Rogier Hendrikus Magdalena Cortie, Michel Riepen | 2016-09-13 |
| 9291914 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | David Bessems, Rogier Hendrikus Magdalena Cortie, Marcus Johannes Van Der Zanden, Paul A. Willems, Jimmy Matheus Wilhelmus Van De Winkel +1 more | 2016-03-22 |
| 9235138 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Rogier Hendrikus Magdalena Cortie, Nicolaas Ten Kate, Niek Jacobus Johannes Roset, Michel Riepen, Henricus Jozef Castelijns +1 more | 2016-01-12 |
| 9229334 | Lithographic apparatus and a device manufacturing method | Nicolaas Rudolf Kemper, Michel Riepen | 2016-01-05 |
| 9213246 | Fluid extraction system, lithographic apparatus and device manufacturing method | Nicolaas Rudolf Kemper, Robertus Nicodemus Jacobus Van Ballegoij, Marcus Martinus Petrus Adrianus Vermeulen, Michel Riepen, Martinus Wilhelmus Van Den Heuvel +3 more | 2015-12-15 |
| 9069262 | Fluid handling structure including gas supply and gas recovery openings, lithographic apparatus and device manufacturing method | Rogier Hendrikus Magdalena Cortie, Michel Riepen | 2015-06-30 |
| 8836912 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | David Bessems, Erik Henricus Egidius Catharina Eummelen, Rogier Hendrikus Magdalena Cortie, Marcus Johannes Van Der Zanden, Jimmy Matheus Wilhelmus Van De Winkel +1 more | 2014-09-16 |
| 8654309 | Fluid extraction system, lithographic apparatus and device manufacturing method | Nicolaas Rudolf Kemper, Robertus Nicodemus Jacobus Van Ballegoij, Marcus Martinus Petrus Adrianus Vermeulen, Michel Riepen, Martinus Wilhelmus Van Den Heuvel +3 more | 2014-02-18 |
| 8475626 | Multiple connected channel micro evaporator | Johannes Fransiscus Maria Velthuis, Frederik Van Der Graaf, Leon Ferdinand Gerard Geers | 2013-07-02 |