Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11131937 | Positioning device, stiffness reduction device and electron beam apparatus | Michaël Johannes Christiaan RONDE, Johannes Hubertus Antonius Van De Rijdt, Maarten Frans Janus Kremers | 2021-09-28 |
| 9927711 | Actuation mechanism, optical apparatus and lithography apparatus | Sven Antoin Johan Hol, Andrea Lodovico Mancuso, Hendricus Johannes Maria Meijer, Marinus Johannes Maria Van Dam | 2018-03-27 |
| 9785051 | Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices | Jan Bernard Plechelmus Van Schoot, Sven Antoin Johan Hol, Edwin Johan Buis, Gosse Charles De Vries, Hako Botma +2 more | 2017-10-10 |
| 9494878 | Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices | Edwin Johan Buis, Gosse Charles De Vries, Sven Antoin Johan Hol | 2016-11-15 |
| 7307688 | Clamping device for optical elements, lithographic apparatus with optical elements in a clamping device, and method for manufacturing such apparatus | Cornelis Christiaan Ottens | 2007-12-11 |
| 7307689 | Lithographic apparatus, reticle masking device for a lithographic apparatus, gas bearing and apparatus comprising such gas bearing | Maurice Philippe Du Mee, Edwin Johan Buis, Johannes Adrianus Antonius Theodorus Dams, Johannes Andreas Henricus Maria Jacobs, Antoine Hendrik Verweij | 2007-12-11 |